De-Ru Jung

Structure and mechanical properties of (TiVCr)N coatings prepared by energetic bombardment sputtering with different nitrogen flow ratios

Du‐Cheng Tsai, Yen‐Lin Huang, Sheng-Ru Lin et al. · Journal of Alloys and Compounds · 2010 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +14

Effect of nitrogen flow ratios on the microstructure and properties of (TiVCr)N coatings by reactive magnetic sputtering

Du‐Cheng Tsai, Yen‐Lin Huang, Sheng-Ru Lin et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2011 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +16

Characteristics of a 10 nm-thick (TiVCr)N multi-component diffusion barrier layer with high diffusion resistance for Cu interconnects

Du‐Cheng Tsai, Yen‐Lin Huang, Sheng-Ru Lin et al. · Surface and Coatings Technology · 2011 · 19 citations

Engineering, Materials Engineering, Materials Science +16

Effect of annealing on microstructure and dielectric properties of Zn 2 Ti 3 O 8 thin films by reactive co-sputtering

Yen‐Lin Huang, Du‐Cheng Tsai, Ying-Chieh Lee et al. · Surface and Coatings Technology · 2012 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +15

Diffusion barrier performance of TiVCr alloy film in Cu metallization

Du‐Cheng Tsai, Yen‐Lin Huang, Sheng-Ru Lin et al. · Applied Surface Science · 2011 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +14