Sheng-Ru Lin

Effect of nitrogen flow ratios on the structure and mechanical properties of (TiVCrZrY)N coatings prepared by reactive magnetron sputtering

Du‐Cheng Tsai, Yen-Lin Huang, Sheng-Ru Lin et al. · Applied Surface Science · 2010 · 106 citations

Materials Science, Materials Engineering, Tribological Coating +10

Structure and mechanical properties of (TiVCr)N coatings prepared by energetic bombardment sputtering with different nitrogen flow ratios

Du‐Cheng Tsai, Yen‐Lin Huang, Sheng-Ru Lin et al. · Journal of Alloys and Compounds · 2010 · 43 citations

Materials Science, Thermal Spray Coating, Engineering +9

Effect of nitrogen flow ratios on the microstructure and properties of (TiVCr)N coatings by reactive magnetic sputtering

Du‐Cheng Tsai, Yen‐Lin Huang, Sheng-Ru Lin et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2011 · 24 citations

Materials Engineering, Materials Science, Magnetic Properties +12

Characteristics of a 10 nm-thick (TiVCr)N multi-component diffusion barrier layer with high diffusion resistance for Cu interconnects

Du‐Cheng Tsai, Yen‐Lin Huang, Sheng-Ru Lin et al. · Surface and Coatings Technology · 2011 · 18 citations

Materials Engineering, Materials Science, Electrical Engineering +11

Diffusion barrier performance of TiVCr alloy film in Cu metallization

Du‐Cheng Tsai, Yen‐Lin Huang, Sheng-Ru Lin et al. · Applied Surface Science · 2011 · 12 citations

Materials Engineering, Materials Science, Engineering +9