FTIR characterization of light emitting Si-rich nitride films prepared by low pressure chemical vapor deposition - Concepedia

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FTIR characterization of light emitting Si-rich nitride films prepared by low pressure chemical vapor deposition

22

Citations

21

References

2007

Year

V. Em. Vamvakas, S. Gardelis

Surface and Coatings Technology

Materials ScienceEngineeringSi-rich Nitride FilmsFtir CharacterizationOptical PropertiesApplied PhysicsSilicon On InsulatorOptoelectronicsChemical Vapor DepositionCompound SemiconductorThin Film Processing

References

	Year	Citations

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