Planar, ion-implanted bipolar devices in GaAs

Single-Step Optical Lift-Off Process

M. Hatzakis, B. J. Canavello, Jane M. Shaw · IBM Journal of Research and Development · 1980 · 211 citations

Engineering, Materials Engineering, Materials Science +13

Gallium Arsenide and Related Compounds, 1978

C.S. Brown · Electronics and Power · 1979 · 98 citations

Natural Sciences, Chemistry, Inorganic Chemistry +7

Electrical profiling and optical activation studies of Be-implanted GaAs

W. V. McLevige, M.J. Helix, K. V. Vaidyanathan et al. · Journal of Applied Physics · 1977 · 78 citations

Engineering, Materials Engineering, Materials Science +17

Low-temperature annealing behavior of GaAs implanted with Be

C. L. Anderson, H. L. Dunlap · Applied Physics Letters · 1979 · 20 citations

Engineering, Materials Engineering, Materials Science +17

Properties of Be-implanted planar GaAs p-n junctions

M.J. Helix, K. V. Vaidyanathan, B. G. Streetman · IEEE Journal of Solid-State Circuits · 1978 · 16 citations

Engineering, Electrical Engineering, Materials Science +17