Formation of almost delta-layered nanoparticles in SiO2 thin film on Si substrate by metal negative-ion implantation

Room-temperature single-electron memory

Kazuo Yano, T. Ishii, T. Hashimoto et al. · IEEE Transactions on Electron Devices · 1994 · 434 citations

Engineering, Computer Engineering, Electrical Engineering +15

Computer simulations of sputtering

J.P. Biersack · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 259 citations

Natural Sciences, Materials Science, Physics +10

Ion implantation technology - 96

E. Ishida, Soumik Banerjee, S. Mehta · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1996 · 131 citations

Engineering, Materials Engineering, Materials Science +5

Negative-ion implantation technique

Junzo Ishikawa, Hiroshi Tsuji, Yoshitaka Toyota et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 100 citations

Self-assembled two-dimensional distribution of nanoparticles with high-current Cu− implantation into insulators

Naoki Kishimoto, N. Umeda, Yoshihiko Takeda et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 70 citations

Natural Sciences, Materials Engineering, Materials Science +14