Kazuya Ueno

Silver nanoparticle formation in thin oxide layer on silicon by silver-negative-ion implantation for Coulomb blockade at room temperature

Hiroshi Tsuji, Nobutoshi Arai, Takuya Matsumoto et al. · Applied Surface Science · 2004 · 33 citations

Engineering, Materials Engineering, Materials Science +17

Delta layer formation of silver nanoparticles in thin silicon dioxide film by negative ion implantation

Hiroshi Tsuji, Nobutoshi Arai, Takuya Matsumoto et al. · Surface and Coatings Technology · 2004 · 14 citations

Engineering, Materials Engineering, Materials Science +16

Formation of almost delta-layered nanoparticles in SiO2 thin film on Si substrate by metal negative-ion implantation

Junzo Ishikawa, Hiroshi Tsuji, Nobutoshi Arai et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2005 · 13 citations

Engineering, Materials Engineering, Materials Science +17