Negative-ion implantation technique

A close to universal negative ion source

R. Middleton, Charles T. Adams · Nuclear Instruments and Methods · 1974 · 147 citations

Natural Sciences, Physics, Nuclear Physics +7

A versatile high intensity plasma sputter heavy negative ion source

G. D. Alton, Yuichiro Mori, A. Takagi et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1988 · 42 citations

Natural Sciences, Physics, Plasma Physics +6

Negative ion beam technology for materials science (invited)

Junzo Ishikawa · Review of Scientific Instruments · 1992 · 36 citations

Engineering, Materials Engineering, Materials Science +14

Carbon negative ion implantation into silicon

Junzo Ishikawa, Hiroshi Tsuji · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 35 citations

Engineering, Materials Engineering, Materials Science +9

Negative-ion source for implantation and surface interaction of negative-ion beams (invited)

Junzo Ishikawa · Review of Scientific Instruments · 1994 · 32 citations

Natural Sciences, Electrical Engineering, Materials Science +13