Concepedia

Publication | Closed Access

Negative-ion implantation technique

DOI

100

Citations

11

References

1995

Year

Junzo Ishikawa, Hiroshi Tsuji, Yoshitaka Toyota, Yasuhito Gotoh, Koji Matsuda, Masayasu Tanjyo, Shigeki Sakai
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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