Masayasu Tanjyo

Negative-ion implantation technique

Junzo Ishikawa, Hiroshi Tsuji, Yoshitaka Toyota et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 100 citations

Ion Implantation, Biomedical Engineering, Negative-ion Implantation Technique +1

Ion rotational velocity of a field-reversed configuration plasma measured by neutral beam probe spectroscopy

Yoshifumi Ito, Masayasu Tanjyo, Shoichi Ohi et al. · The Physics of Fluids · 1987 · 20 citations

Ion Temperature Ti, Engineering, Plasma Science +21

Ultralow-Thermal-Budget CMOS Process Using Flash-Lamp Annealing for 45 nm Metal/High- $k$ FETs

Fumio Ootsuka, A. Katakami, Kiyoshi Shirai et al. · IEEE Transactions on Electron Devices · 2008 · 19 citations

Engineering, Integrated Circuits, Silicon On Insulator +17

The charging mechanism of insulated electrode in negative-ion implantation

Shigeki Sakai, Yasuhito Gotoh, Hiroshi Tsuji et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 16 citations

Electrical Engineering, Ion Implantation, Engineering +5

Cluster Ion Implantation System: Claris for Beyond 45nm Device Fabrication (Ii)

Masayasu Tanjyo, Nariaki Hamamoto, Tsutomu Nagayama et al. · ECS Transactions · 2009 · 16 citations

Engineering, Device Fabrication, Ion Implantation +17