Yasuhito Gotoh

Negative-ion implantation technique

Junzo Ishikawa, Hiroshi Tsuji, Yoshitaka Toyota et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 100 citations

Ion Implantation, Biomedical Engineering, Negative-ion Implantation Technique +1

Work function measurement of transition metal nitride and carbide thin films

Ryo Fujii, Yasuhito Gotoh, Meiyong Liao et al. · Vacuum · 2005 · 73 citations

Materials Science, Engineering, Applied Physics +8

Ion beam assisted deposition of niobium nitride thin films for vacuum microelectronics devices

Yasuhito Gotoh, Masayoshi Nagao, T. Ura et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 57 citations

Materials Science, Ion Implantation, Engineering +9

Influence of cathode material on emission characteristics of field emitters for microelectronics devices

Junzo Ishikawa, Hiroshi Tsuji, Yasuhito Gotoh et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 55 citations

Engineering, Glow Discharge, Vacuum Plasma Technology +17

Secondary electron emission and surface potential of SiO2 film surface by negative ion bombardment

Hiroshi Tsuji, Yasuhito Gotoh, Junzo Ishikawa · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1998 · 50 citations

Materials Science, Engineering, Surface Potential +9