Publication | Closed Access
Secondary electron emission and surface potential of SiO2 film surface by negative ion bombardment
50
Citations
6
References
1998
Year
Materials ScienceEngineeringSurface PotentialSurface AnalysisSurface ScienceApplied PhysicsVacuum DeviceNegative Ion BombardmentSilicon On InsulatorIon EmissionSio2 Film SurfaceChemical Vapor Deposition
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