Concepedia

Publication | Closed Access

Ion beam assisted deposition of niobium nitride thin films for vacuum microelectronics devices

DOI

57

Citations

5

References

1999

Year

Yasuhito Gotoh, Masayoshi Nagao, T. Ura, Hiroshi Tsuji, J. Ishikawa
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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