Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma: Comparisons with experiments and validations

Abstract

Particle-in-cell Monte Carlo collision (PIC-MCC) and fluid simulations of argon-oxygen plasmas in capacitively and inductively coupled plasma reactors are presented. Potential profiles and electron/ion kinetic information such as electron/ion energy distributions and temperatures are compared with experimental data as well as with other analytical and numerical results. One-dimensional PIC-MCC simulations compare favorably with experimental data obtained in capacitively coupled reactors over a wide range of pressure and power. Two-dimensional fluid simulations of capacitive discharges differs from the results of PIC-MCC simulations as nonlocal effects play an important role in these discharges. Fluid simulations as nonlocal inductively coupled plasmas, however, agree favorably with experimental observations.