A combined piezoresistive/capacitive pressure sensor with self-test function based on thermal actuation

Gaseous slip flow in long microchannels

Errol B. Arkilic, Martin A. Schmidt, Kenneth Breuer · Journal of Microelectromechanical Systems · 1997 · 711 citations

Engineering, Mechanical Engineering, Fluid Dynamics +16

Liquid transport in micron and submicron channels

J. Pfahler, John C. Harley, Haim H. Bau et al. · Sensors and Actuators A Physical · 1990 · 328 citations · Full text

Engineering, Mechanical Engineering, Physics +17

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations

Engineering, Materials Engineering, Mechanical Engineering +17

Modeling micropumps with electrical equivalent networks

Tarik Bourouina, Jean-Paul Grandchamp · Journal of Micromechanics and Microengineering · 1996 · 112 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A capacitive pressure sensor with low impedance output and active suppression of parasitic effects

Eric Peeters, A. Bossche, Willy Sansen · Sensors and Actuators A Physical · 1990 · 104 citations

Engineering, Bioengineering, Analog Electronics +16