A capacitive pressure sensor with low impedance output and active suppression of parasitic effects

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Field Assisted Glass-Metal Sealing

George Wallis, D. Pomerantz · Journal of Applied Physics · 1969 · 730 citations

Natural Sciences, Materials Engineering, Materials Science +7

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations

Engineering, Materials Engineering, Mechanical Engineering +17

A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity

Y. S. Lee, K.D. Wise · IEEE Transactions on Electron Devices · 1982 · 217 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Switched-capacitor circuit design

R. Gregorian, Ken Martin, Gábor C. Temes · Proceedings of the IEEE · 1983 · 191 citations

Engineering, Electrical Engineering, Analog Electronics +15