Formation of high-density silicon dots on a silicon-on-insulator substrate - Concepedia

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Formation of high-density silicon dots on a silicon-on-insulator substrate

18

Citations

9

References

1999

Year

M. Tabe, Minoru Kumezawa, Takuya Yamamoto, Shigenori Makita, T. Yamaguchi, Yasuhiko Ishikawa

Applied Surface Science

Materials ScienceHigh-density Silicon DotsEngineeringMicrofabricationApplied PhysicsSiliceneSemiconductor Device FabricationSilicon On Insulator

References

	Year	Citations

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