Concepedia

Single-phase aluminum nitride films by dc-magnetron sputtering

J. S. Morgan, Wayne A. Bryden, Thomas J. Kistenmacher, S. A. Ecelberger, T. O. Poehler

Journal of materials research/Pratt's guide to venture capital sources · 1990 · 23 citations · 17 references

DOI

Concepts

References

17

Modeling of reactive sputtering of compound materials

S. Berg, Hans‐Olof Blom, T. Larsson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 373 citations

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On the preparation, optical properties and electrical behaviour of aluminium nitride

G. A. Cox, Donal Cummins, K. Kawabe et al. · Journal of Physics and Chemistry of Solids · 1967 · 119 citations

, , +16

Discharge characteristics for magnetron sputtering of Al in Ar and Ar/O2 mixtures

S. Maniv, W. D. Westwood · Journal of Vacuum Science and Technology · 1980 · 114 citations

, , +13

Optical phonons of aluminum nitride

C. Carlone, K.M. Lakin, H. R. Shanks · Journal of Applied Physics · 1984 · 93 citations

, , +17

Synthesis of compound thin films by dual ion beam deposition. I. Experimental approach

J. M. E. Harper, J. J. Cuomo, H. T. G. Hentzell · Journal of Applied Physics · 1985 · 81 citations

, , +16