Electron beam induced deposited etch masks

Offset masks for lift-off photoprocessing

G. J. Dolan · Applied Physics Letters · 1977 · 692 citations

Engineering, Electrical Engineering, Materials Science +14

Room temperature operation of a single electron transistor made by the scanning tunneling microscope nanooxidation process for the TiO<i>x</i>/Ti system

Kazuhiko Matsumoto, Masashi Ishii, Kazuhito Segawa et al. · Applied Physics Letters · 1996 · 393 citations

Natural Sciences, Materials Engineering, Materials Science +17

Approaching the Resolution Limit of Nanometer-Scale Electron Beam-Induced Deposition

Willem F. van Dorp, B. van Someren, P. Kruit et al. · Nano Letters · 2005 · 265 citations

Engineering, Materials Engineering, Materials Science +7

Direct fabrication of nanowires in an electron microscope

Natalia Silvis-Cividjian, P. Kruit, M. A. J. v.d. Stam et al. · Applied Physics Letters · 2003 · 107 citations · Full text

Engineering, Materials Engineering, Materials Science +11

Solutions to a proximity effect in high resolution electron beam induced deposition

Willem F. van Dorp, S. Lazar, P. Kruit · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 21 citations

Natural Sciences, Materials Science, Electronic Materials +7