C. Th. H. Heerkens

Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection

A. Šakić, Lis K. Nanver, Gerard van Veen et al. · 2010 · 38 citations

Engineering, Electrical Engineering, Materials Science +17

Electron beam induced deposited etch masks

C. Th. H. Heerkens, Martin J. Kamerbeek, Willem F. van Dorp et al. · Microelectronic Engineering · 2008 · 24 citations

Engineering, Electrical Engineering, Physics +12

Charge-induced pattern displacement in E-beam lithography

Kerim T. Arat, Thomas Klimpel, A.C. Zonnevylle et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2019 · 22 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Boron-layer silicon photodiodes for high-efficiency low-energy electron detection

A. Šakić, Lis K. Nanver, T.L.M. Scholtes et al. · Solid-State Electronics · 2011 · 19 citations

Engineering, Electrical Engineering, Materials Engineering +14

Silicon photodiodes for high-efficiency low-energy electron detection

Lis K. Nanver, T.L.M. Scholtes, C. Th. H. Heerkens et al. · 2010 · 11 citations

Engineering, Electrical Engineering, Materials Science +17