Thomas Klimpel - Concepedia

Author

Thomas Klimpel

Also Known As

Gregor, T. Klimpel, Thomas Klimpel

Publications

186

Citations

H-Index

Concepts

All Affiliations

Thomas Klimpel is an author at Synopsys (United States) specializing in engineering, applied physics, and microelectronics.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	124
2	Applied Physics	3	3	56
3	Medicine	1	1	19
4	Civil Engineering	1	1	52
5	Computer Engineering	1	1	16

Thomas Klimpel

Publications

124

Citations

H-Index

Page 1

	Year	Citations
Plastic deformation of corrugated rails—a numerical approach using material data of rail steel A. E. Böhmer, Thomas Klimpel Wear EngineeringSevere Plastic DeformationDeformation ModelingMechanical EngineeringCivil Engineering	2002	52
Charge-induced pattern displacement in E-beam lithography Kerim T. Arat, Thomas Klimpel, A.C. Zonnevylle, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena EngineeringElectron-beam LithographyElectron DiffractionElectron OpticBeam Lithography	2019	22
Model based hybrid proximity effect correction scheme combining dose modulation and shape adjustments Thomas Klimpel, Martin Schulz, Rainer Zimmermann, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena Dose ModulationDose DistributionEngineeringBeam LithographyElectron-beam Lithography	2011	19
Simultaneous source-mask optimization: a numerical combining method Thomas Mülders, Vitaliy Domnenko, Bernd Küchler, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Mathematical ProgrammingSource SeparationEngineeringComputational IlluminationMask Pattern Optimization	2010	16
Model improvements to simulate charging in scanning electron microscope Kerim T. Arat, Thomas Klimpel Journal of Micro/Nanolithography MEMS and MOEMS Charge ExcitationsEngineeringMicroscopyCharging ModelsModel Improvements	2019	15

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