Thomas Klimpel

Plastic deformation of corrugated rails—a numerical approach using material data of rail steel

A. E. Böhmer, Thomas Klimpel · Wear · 2002 · 52 citations

Engineering, Severe Plastic Deformation, Deformation Modeling +11

Charge-induced pattern displacement in E-beam lithography

Kerim T. Arat, Thomas Klimpel, A.C. Zonnevylle et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2019 · 22 citations · Full text

Engineering, Electron-beam Lithography, Electron Diffraction +18

Model based hybrid proximity effect correction scheme combining dose modulation and shape adjustments

Thomas Klimpel, Martin Schulz, Rainer Zimmermann et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 19 citations

Dose Modulation, Dose Distribution, Engineering +15

Simultaneous source-mask optimization: a numerical combining method

Thomas Mülders, Vitaliy Domnenko, Bernd Küchler et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 16 citations

Mathematical Programming, Source Separation, Engineering +17

Model improvements to simulate charging in scanning electron microscope

Kerim T. Arat, Thomas Klimpel · Journal of Micro/Nanolithography MEMS and MOEMS · 2019 · 15 citations · Full text

Charge Excitations, Engineering, Microscopy +20