Concepedia

Kerim T. Arat

KT

4

Publications

65

Citations

4

H-Index

2019

Active since

Affiliations

Delft University of Technology(Current)

GenISys (Germany)

Kerim T. Arat is an author at Delft University of Technology specializing in electrical engineering, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringPhysicsMicroscopyElectrical InsulationSpectroscopyImage AnalysisMachine VisionComputer Vision

Publications per year

2019–2020

4

Publications

4

Charge-induced pattern displacement in E-beam lithography

Kerim T. Arat, Thomas Klimpel, A.C. Zonnevylle et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2019 · 22 citations · Full text

Engineering, Electron-beam Lithography, Electron Diffraction +18

Model improvements to simulate charging in scanning electron microscope

Kerim T. Arat, Thomas Klimpel · Journal of Micro/Nanolithography MEMS and MOEMS · 2019 · 15 citations · Full text

Charge Excitations, Engineering, Microscopy +20

Estimating Step Heights from Top-Down SEM Images

Kerim T. Arat, Jens Bolten, A.C. Zonnevylle et al. · Microscopy and Microanalysis · 2019 · 14 citations · Full text

Engineering, Microscopy, Image Analysis +21

Model sensitivity analysis of Monte-Carlo based SEM simulations

Kerim T. Arat · Results in Physics · 2020 · 14 citations · Full text

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