Kerim T. Arat - Concepedia

Author

Kerim T. Arat

Also Known As

Ache, Arat, K.T., K. T. Arat, Kerim Arat, Kerim T Arat, Kerim T. Arat, Kerim Tugrul Arat

Publications

Citations

H-Index

Concepts

All Affiliations

Kerim T. Arat is an author at Delft University of Technology specializing in electrical engineering, applied physics, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	51
2	Applied Physics	3	3	51
3	Electrical Engineering	3	3	51
4	Natural Sciences	1	1	14
5	Materials Engineering	1	1	22

Kerim T. Arat

Publications

Citations

H-Index

Page 1

	Year	Citations
Charge-induced pattern displacement in E-beam lithography Kerim T. Arat, Thomas Klimpel, A.C. Zonnevylle, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena EngineeringElectron-beam LithographyElectron DiffractionElectron OpticBeam Lithography	2019	22
Model improvements to simulate charging in scanning electron microscope Kerim T. Arat, Thomas Klimpel Journal of Micro/Nanolithography MEMS and MOEMS Charge ExcitationsEngineeringMicroscopyCharging ModelsModel Improvements	2019	15
Estimating Step Heights from Top-Down SEM Images Kerim T. Arat, Jens Bolten, A.C. Zonnevylle, Microscopy and Microanalysis EngineeringMicroscopyImage AnalysisElectron MicroscopyElectron Spectroscopy	2019	14
Model sensitivity analysis of Monte-Carlo based SEM simulations Kerim T. Arat Results in Physics	2020	14

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