Concepedia

Bernd Küchler

BK

Statistics

Publications

3

Citations

48

H-Index

3

Active since

2010

Affiliations

Synopsys (Germany)(Current)

Synopsys (United States)

Bernd Küchler is an author at Synopsys (Germany) specializing in engineering, mask fabrication, and mask design.

Publications per year

2010–2017

3

Publications

3

ILT optimization of EUV masks for sub-7nm lithography

Kevin Hooker, Kevin Lucas, Bernd Küchler et al. · 2017 · 18 citations

, , +10

Simultaneous source-mask optimization: a numerical combining method

Thomas Mülders, Vitaliy Domnenko, Bernd Küchler et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 16 citations

, , +14

Role of 3D photo-resist simulation for advanced technology nodes

Aravind Narayana Samy, Rolf Seltmann, Frank Kahlenberg et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 14 citations

, , +16

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