Concepedia

Frank Kahlenberg

FK

4

Publications

234

Citations

4

H-Index

2000

Active since

Affiliations

Fraunhofer Institute for Silicate Research(Current)

Frank Kahlenberg is an author at Fraunhofer Institute for Silicate Research specializing in engineering, applied physics, and optoelectronics.

Top concepts

EngineeringApplied PhysicsOptoelectronicsPolymersChemistryEducationCalibrationMeasurementPhotovoltaicsInstrumentation

Publications per year

2000–2013

4

Publications

4

ORMOCER®s for Optical Interconnection Technology

R. Buestrich, Frank Kahlenberg, Michael Popall et al. · Journal of Sol-Gel Science and Technology · 2001 · 186 citations

Low Si-OH ORMOCER<sup>®s</sup> for Dielectrical and Optical Interconnection Technology

R. Buestrich, Frank Kahlenberg, Michael Popall et al. · MRS Proceedings · 2000 · 22 citations

Electrical Engineering, Optical Materials, Engineering +7

Role of 3D photo-resist simulation for advanced technology nodes

Aravind Narayana Samy, Rolf Seltmann, Frank Kahlenberg et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 14 citations

Engineering, Resist Model Portability, Electron-beam Lithography +21

ORMOCER<sup>®</sup>s (Organic-Inorganic Hybrid Polymers) for Telecom Applications: Structure/Property Correlations

Frank Kahlenberg, Michael Popall · MRS Proceedings · 2004 · 12 citations

Materials Science, Engineering, Polymer Hybrid +8

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