Concepedia

Author

Rolf Seltmann

Fraunhofer Institute for Microelectronic Circuits and Systems

Also Known As

R Seltmann, R. Seltmann, Rolf Seltmann, Seltmann, R.

45

Publications

193

Citations

8

H-Index

27

Concepts

All Affiliations

Fraunhofer Institute for Microelectronic Circuits and Systems
RS

About

Rolf Seltmann is an author at Fraunhofer Institute for Microelectronic Circuits and Systems specializing in engineering, optoelectronics, and photonics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

5

5

74

2

Applied Physics

2

2

27

3

Biomedical Engineering

2

2

37

4

Education

1

1

14

5

Architectural Engineering

1

1

10

Rolf Seltmann

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6

Publications

116

Citations

6

H-Index

YearCitations

The use of EUV lithography to produce demonstration devices

Bruno LaFontaine, Yunfei Deng, Ryoung-Han Kim,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2008

42

Deformable micromirror devices as phase-modulating high-resolution light valves

H. Kück, Wolfgang Doleschal, Andreas Gehner,

Sensors and Actuators A Physical

1996

27

Role of 3D photo-resist simulation for advanced technology nodes

Aravind Narayana Samy, Rolf Seltmann, Frank Kahlenberg,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2013

14

New system for fast submicron optical direct writing

Rolf Seltmann, Wolfgang Doleschal, Andreas Gehner,

Microelectronic Engineering

1996

13

Meeting overlay requirements for future technology nodes with in-die overlay metrology

Bernd Schulz, Rolf Seltmann, Jens Busch,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2007

10

Deformable Micromirror Devices As Phase Modulating High Resolution Light Valves

H. Kück, Wolfgang Doleschal, Andreas Gehner,

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95

2005

10

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