Statistics
Publications
1
Citations
10
H-Index
1
Active since
2007
Affiliations
Akademie Mode & Design(Current)
Jens Busch is an author at Akademie Mode & Design specializing in manufacturing engineering, engineering, and very-large-scale integration layout.
Publications per year
2007–2007
1
1
Meeting overlay requirements for future technology nodes with in-die overlay metrology
Bernd Schulz, Rolf Seltmann, Jens Busch et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 10 citations
Engineering, Manufacturing Engineering, Digital Fabrication +5
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