Statistics
Publications
2
Citations
32
H-Index
2
Active since
2017
Affiliations
Synopsys (United States)(Current)
Kevin Hooker is an author at Synopsys (United States) specializing in microfabrication, integrated circuit fabrication, and mask design.
Publications per year
2017–2022
2
2
ILT optimization of EUV masks for sub-7nm lithography
Kevin Hooker, Kevin Lucas, Bernd Küchler et al. · 2017 · 18 citations
Engineering, Electrical Engineering, Manufacturing Engineering +10
Curvilinear mask solutions for full-chip EUV lithography
Kevin Hooker, Guangming Xiao, Yu-Po Tang et al. · 2022 · 14 citations
Engineering, Computer Engineering, Manufacturing Engineering +10
1–2 of 2