Microhotplate platforms for chemical sensor research

Interactions of tin oxide surface with O2, H2O AND H2

Noboru Yamazoe, Jun Fuchigami, Masato Kishikawa et al. · Surface Science · 1979 · 833 citations

Natural Sciences, Materials Engineering, Materials Science +14

Anisotropic etching of silicon

K.E. Bean · IEEE Transactions on Electron Devices · 1978 · 796 citations

Engineering, Materials Engineering, Materials Science +15

Array-Based Vapor Sensing Using Chemically Sensitive, Carbon Black−Polymer Resistors

Mark C. Lonergan, Erik J. Severin, Brett J. Doleman et al. · Chemistry of Materials · 1996 · 628 citations

Natural Sciences, Materials Engineering, Materials Science +17

Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing

John S. Suehle, Richard E. Cavicchi, Michael Gaitan et al. · IEEE Electron Device Letters · 1993 · 333 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Optimization of temperature programmed sensing for gas identification using micro-hotplate sensors

Tekin Kunt, Thomas J. McAvoy, Richard E. Cavicchi et al. · Sensors and Actuators B Chemical · 1998 · 130 citations

Engineering, Chemical Engineering, Mechanical Engineering +13