Effect of hydrogen peroxide on oxidation of copper in CMP slurries containing glycine and Cu ions

Initial and final state effects in the ESCA spectra of cadmium and silver oxides

Stephen W. Gaarenstroom, Nicholas Winograd · The Journal of Chemical Physics · 1977 · 833 citations

Natural Sciences, Chemistry, Materials Science +16

Copper interconnection integration and reliability

C.‐K. Hu, B. M. Luther, F. B. Kaufman et al. · Thin Solid Films · 1995 · 224 citations

Engineering, Electrical Engineering, Materials Science +12

Chemical processes in the chemical mechanical polishing of copper

Joseph M. Steigerwald, S. P. Murarka, R.J. Gutmann et al. · Materials Chemistry and Physics · 1995 · 197 citations

Engineering, Materials Engineering, Materials Science +14

Impedance studies of the inhibitive effect of benzotriazole on the corrosion of copper in sodium chloride medium

F. El‐Taib Heakal, Shirō Haruyama · Corrosion Science · 1980 · 187 citations

Natural Sciences, Materials Engineering, Materials Science +16

XPS Studies of Anodic Surface Films on Copper Electrodes

Wolfgang Kautek, Joseph G. Gordon · Journal of The Electrochemical Society · 1990 · 138 citations

Natural Sciences, Chemistry, Materials Science +17