Chemical processes in the chemical mechanical polishing of copper - Concepedia

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Chemical processes in the chemical mechanical polishing of copper

195

Citations

17

References

1995

Year

Joseph M. Steigerwald, S. P. Murarka, R.J. Gutmann, D. J. Duquette

Materials Chemistry and Physics

Materials ScienceChemical EngineeringEngineeringMaterial ProcessingCorrosionMetallurgical ProcessSurface PolishingChemical ProcessesMicrostructureMetal Processing

References

	Year	Citations

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