Journal of Crystal Growth · 1974 · 39 citations · 7 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsSemiconductor Device MaterialsSemiconductor HeterostructuresSemiconductor Thin FilmsSilicon MaterialsThin-film DepositionThin-film MaterialsHeteroepitaxyHeterostructuresSilicon Thin FilmsSputteringThin-film Semiconductors
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The diffusion of germanium in silicon
G.L. McVay, A. R. DuCharme · Journal of Applied Physics · 1973 · 68 citations