Journal of Crystal Growth · 1971 · 80 citations · 7 references
EngineeringMaterials EngineeringMaterials ScienceSemiconductor MaterialsSurface ScienceThin FilmsEpitaxial GrowthSemiconductor InterfacesSemiconductor SurfacesSemiconductor Thin FilmsSilicon MaterialsSurface PhysicsEpitaxial Film GrowthFilm Growth MechanismsSiliconSilicon EpitaxySilicon Thin FilmsSublimationSurface GrowthThermal Evaporation
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