Publication | Open Access
Growth kinetics of Si on fullsheet, patterned and silicon-on-insulator substrates
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Citations
33
References
2003
Year
Materials ScienceElectrical EngineeringEpitaxial GrowthEngineeringMicrofabricationSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationSilicon On InsulatorGrowth KineticsChemical Vapor Deposition
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