Robotics and Computer-Integrated Manufacturing · 2014 · 99 citations · 25 references
EngineeringMechanical EngineeringMechatronics EngineeringActuatorsMicroelectromechanical SystemsRoboticsCompliant MechanismsFlexible Robot DynamicsMems ActuatorsNanoelectromechanical SystemsNanomechanicsSoft Robot DesignMicro-positioning SystemsNanopositioningNanopositioning Systems
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