Concepedia

Compliant substrates: A comparative study of the relaxation mechanisms of strained films bonded to high and low viscosity oxides

Karl D. Hobart, Fritz J. Kub, M. Fatemi, M. E. Twigg, Philip E. Thompson, T. S. Kuan, C. K. Inoki

Journal of Electronic Materials · 2000 · 88 citations · 12 references

DOI

Concepts

References

12

Silicon on insulator material technology

M. Bruel · Electronics Letters · 1995 · 1K citations

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New approach to grow pseudomorphic structures over the critical thickness

Yu‐Hwa Lo · Applied Physics Letters · 1991 · 233 citations

, , +17

New approach to the growth of low dislocation relaxed SiGe material

Adrian R. Powell, Subramanian S. Iyer, F. K. LeGoues · Applied Physics Letters · 1994 · 181 citations

, , +17

Lattice engineered compliant substrate for defect-free heteroepitaxial growth

Felix Ejeckam, Yu‐Hwa Lo, Shanthi Subramanian et al. · Applied Physics Letters · 1997 · 133 citations

, , +16

Dislocation-free InSb grown on GaAs compliant universal substrates

Felix Ejeckam, M. L. Seaford, Yu‐Hwa Lo et al. · Applied Physics Letters · 1997 · 93 citations

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