Two-Dimensional Distributions of Ti and Ti⁺ Densities in High-Pressure Magnetron Sputtering Discharges

Abstract

We measured two-dimensional distributions of Ti and Ti + densities in magnetron sputtering plasmas by laser-induced fluorescence (LIF) imaging spectroscopy. It has been found that the production of Ti + is enhanced by a high gas pressure. The peak of the Ti + density is located at a distance of 4–5 cm from the target surface, indicating the gas-phase production of Ti + in the downstream plasma. Since the plasma density and the electron temperature measured using a Langmuir probe are low in the downstream plasma, this result suggests that the dominant production process of Ti + is not electron impact ionization of Ti (Ti+e→Ti + e+e). Although another candidate for the gas-phase production of Ti + is Penning ionization (Ti+Ar M →Ti + +Ar+e), experimental results on Ar M is negative about the contribution of Penning ionization to the gas-phase production of Ti + .