Concepedia
Statistics
Publications
7
Citations
123
H-Index
Active since
2000
Affiliations
Nagoya University(Current)
National Institute of Technology, Suzuka College
K. Shibagaki is an author at Nagoya University specializing in natural sciences, physics, and spectroscopy.
Publications per year
2000–2008
Spatial distribution of the velocity distribution function of Fe atoms in a magnetron sputtering plasma source
K. Shibagaki, Koichi Sasaki · Journal of Applied Physics · 2005 · 31 citations
Natural Sciences, Physics, Optics +14
Two-Dimensional Distributions of Ti and Ti<sup>+</sup> Densities in High-Pressure Magnetron Sputtering Discharges
Noriharu Takada, K. Shibagaki, Keiji Nakamura et al. · Japanese Journal of Applied Physics · 2005 · 26 citations
Natural Sciences, Physics, Plasma Physics +14
Formation of Positive and Negative Carbon Cluster Ions in the Initial Phase of Laser Ablation in Vacuum
K. Shibagaki, T. Kawashima, Koichi Sasaki et al. · Japanese Journal of Applied Physics · 2000 · 16 citations
Natural Sciences, Chemistry, Physics +12
Analysis of the molecular structure of fluorocarbon deposits produced by C4F8 and C4F8–H2 plasmas
Noriharu Takada, K. Shibagaki, K. Sasaki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 14 citations
Natural Sciences, Chemistry, Materials Science +9
Chemical bonds of fluorocarbon films which can be a source of CFx radicals
Noriharu Takada, Takanori Iida, K. Shibagaki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 14 citations
Natural Sciences, Materials Science, Physics +14
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