Analysis of the molecular structure of fluorocarbon deposits produced by C4F8 and C4F8–H2 plasmas

Abstract

Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation N. Takada, K. Shibagaki, K. Sasaki, K. Kadota, K.-I. Oyama; Analysis of the molecular structure of fluorocarbon deposits produced by C4F8 and C4F8–H2 plasmas. J. Vac. Sci. Technol. A 1 March 2001; 19 (2): 689–692. https://doi.org/10.1116/1.1349198 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology A Search Advanced Search |Citation Search