Silicide thin films and their applications in microelectronics

Constitution of Binary Alloys

Max Hansen, K. Anderko, H. W. Salzberg · Journal of The Electrochemical Society · 1958 · 14.8K citations

Natural Sciences, Chemistry, Materials Science +8

Thin Films—Interdiffusion and Reactions

J. M. Poate, K. N. Tu, Jean-Claude Mayor et al. · Journal of The Electrochemical Society · 1979 · 1.7K citations

Natural Sciences, Materials Engineering, Materials Science +12

Theory of Growth of Spherical Precipitates from Solid Solution

Clarence Zener · Journal of Applied Physics · 1949 · 1.1K citations

Natural Sciences, Physics, Chemical Kinetics +16

Refractory silicides for integrated circuits

S. P. Murarka · Journal of Vacuum Science and Technology · 1980 · 601 citations

Engineering, Electrical Engineering, Materials Science +17

Growth kinetics of planar binary diffusion couples: ’’Thin-film case’’ versus ’’bulk cases’’

U. Gösele, K. N. Tu · Journal of Applied Physics · 1982 · 568 citations

Natural Sciences, Materials Engineering, Materials Science +17