IEEE Journal of Selected Topics in Quantum Electronics · 2004 · 18 citations · 3 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationOptical MaterialsGelsMems FabricationMems MaterialsMicrofabrication MaterialsMicrofabrication ProcessesOptical MemsDiffractive Optical ElementsDiffractive ProcessesMicroelectromechanical System FabricationSiliconSol-gel MaterialsSol-gel SynthesisSol-gel Systems
Replication technology using sol-gel materials offers an interesting alternative to the current approach to optical microelectromechanical systems (MEMS) fabricated in silicon using lithographic and micromachining technologies. The use of UV-curable sol-gel materials enables optical features such as microlenses and diffractive optical elements to be fabricated in the same process step as the MEMS structures, and has the potential of low-cost high-resolution mass-production technology. This paper describes progress in work aimed at investigating the potential of this approach.
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