Epitaxial monocrystalline SiC films grown on Si by HFCVD at 780°C

Diamond and diamond-like films

John C. Angus · Thin Solid Films · 1992 · 179 citations

Humanities, Materials Engineering, Materials Science +3

High quality 4H-SiC epitaxial layers grown by chemical vapor deposition

Olof Kordina, Anne Henry, J. P. Bergman et al. · Applied Physics Letters · 1995 · 52 citations

Engineering, Materials Engineering, Materials Science +17

Deposition of cubic SiC films on silicon using dimethylisopropylsilane

Jin‐Hyo Boo, K.‐S. Yu, M. Lee et al. · Applied Physics Letters · 1995 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +17