Concepedia

New approach of Monte Carlo simulation for low energy electron beam lithography

Soo-Hwan Kim, Young-Mog Ham, Wongyu Lee, Kukjin Chun

Microelectronic Engineering · 1998 · 17 citations · 3 references

DOI

Concepts

References

3

An empirical stopping power relationship for low‐energy electrons

David C. Joy, Shenghong Luo · Scanning · 1989 · 454 citations

, , +9

Empirical forms for the electron/atom elastic scattering cross sections from 0.1 to 30 keV

R. Browning, T. Z. Li, Benjamin W. Chui et al. · Journal of Applied Physics · 1994 · 98 citations

, , +13

Study of the spatial distribution of backscattered electrons from a gold target with a new Monte Carlo simulation

Masaaki Yasuda, Hiroaki Kawata, Kenji Murata · Journal of Applied Physics · 1995 · 43 citations

, , +12