Chemical vapor deposition and characterization of hafnium oxide films - Concepedia

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Chemical vapor deposition and characterization of hafnium oxide films

45

Citations

21

References

2007

Year

T. P. Smirnova, L. V. Yakovkina, V.N. Kitchai, Yu. V. Shubin, Natalia B. Morozova, Kseniya V. Zherikova

Journal of Physics and Chemistry of Solids

Materials ScienceEngineeringSurface ScienceThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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