Correction of nonlinear lateral distortions of scanning probe microscopy images

Single-tube three-dimensional scanner for scanning tunneling microscopy

G. Binnig, D. P. E. Smith · Review of Scientific Instruments · 1986 · 574 citations · Full text

Natural Sciences, Materials Science, Mechanical Engineering +16

Modeling hysteresis in piezoceramic actuators

Ping Ge, Musa Jouaneh · Precision Engineering · 1995 · 439 citations · Full text

Engineering, Mechanical Engineering, Actuators +11

Optical scan-correction system applied to atomic force microscopy

R. C. Barrett, C. F. Quate · Review of Scientific Instruments · 1991 · 157 citations

Engineering, Mechanical Engineering, Actuators +12

Advances in Scanning Force Microscopy for Dimensional Metrology

Hans‐Ulrich Danzebrink, Ludger Koenders, Günter Wilkening et al. · CIRP Annals · 2006 · 137 citations

Engineering, Materials Engineering, Materials Science +14

Long-range AFM profiler used for accurate pitch measurements

Felix Meli, R. Thalmann · Measurement Science and Technology · 1998 · 127 citations

Engineering, Mechatronics Engineering, Instrumentation +14