Publication | Closed Access
Metrological atomic force microscope using a large range scanning dual stage
22
Citations
10
References
2009
Year
Materials ScienceEngineeringElectron MicroscopyPhysicsMicrofabricationMicroscopySpectroscopyNatural SciencesApplied PhysicsMicroscopy MethodDual StageScanning Force MicroscopyScanning Probe MicroscopyElectron MicroscopeLarge RangeInstrumentation
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