Concepedia

Design and use of a vacuum system for high rate reactive sputtering of TiO2/TiN/TiO2 solar control films

A.G. Spencer, M. Georgson, Charles A. Bishop, Emmeli Stenberg, R.P. Howson

Solar Energy Materials · 1988 · 31 citations · 6 references

DOI

Concepts

References

6

Optical Properties of Thin Solid Films

O.S. Heavens · 1965 · 1.2K citations

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Optical constants of thin TiN films: thickness and preparation effects

E. Valkonen, Carl-Gustaf Ribbing, Jan-Erik Sundgren · Applied Optics · 1986 · 64 citations

, , +17

Pressure stability in reactive magnetron sputtering

A.G. Spencer, R.P. Howson, R Lewin · Thin Solid Films · 1988 · 60 citations

, , +9

Advances in high rate sputtering with magnetron-plasmatron processing and instrumentation

S. Schiller, U. Heisig, K. Goedicke et al. · Thin Solid Films · 1979 · 43 citations

, , +14

Features of and IN SITU measurements on absorbing TiOx films produced by reactive d.c. magnetron-plasmatron sputtering

S. Schiller, G. Beister, S. Scheneider et al. · Thin Solid Films · 1980 · 41 citations

, , +13