Design and use of a vacuum system for high rate reactive sputtering of TiO2/TiN/TiO2 solar control films - Concepedia

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Design and use of a vacuum system for high rate reactive sputtering of TiO2/TiN/TiO2 solar control films

31

Citations

6

References

1988

Year

A.G. Spencer, M. Georgson, Charles A. Bishop, Emmeli Stenberg, R.P. Howson

Solar Energy Materials

Materials ScienceElectrical EngineeringEngineeringSolar PowerVacuum DeviceThin FilmsChemical Vapor DepositionVacuum SystemPhotovoltaicsThin Film ProcessingSolar Cell Materials

References

	Year	Citations

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