Thin Solid Films · 1980 · 41 citations · 15 references
Natural SciencesMaterials SciencePhysicsMaterials ChemistrySurface ScienceThin FilmsThin Film OxidationThin-film DepositionThin-film MaterialsIn-situ MeasurementsMagnetron SputteringPlasma SputteringReactive SputteringSputteringSputtering ProcessesSputtering Techniques
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The relationship between optical inhomogeneity and film structure
M. Harris, H. A. Macleod, Shigetaro Ogura et al. · Thin Solid Films · 1979 · 162 citations