Concepedia

Effect of microwave radiation on the properties of Ta2O5–Si microstructures

E. Atanassova, V. F. Mitin, J. Koprinarova, O.S. Lytvym, V.V. Schinkarenko, Daniela Virovska

Microelectronics Reliability · 2004 · 18 citations · 30 references

DOI

Concepts

References

30

High-κ gate dielectrics: Current status and materials properties considerations

G. D. Wilk, Robert M. Wallace, J. Anthony · Journal of Applied Physics · 2001 · 5.9K citations

, , +17

Alternative dielectrics to silicon dioxide for memory and logic devices

Angus I. Kingon, Jon‐Paul Maria, S. K. Streiffer · Nature · 2000 · 1.3K citations

, , +14

Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications

C. Chaneliere, Jean‐Luc Autran, R. A. B. Devine et al. · Materials Science and Engineering R Reports · 1998 · 676 citations

, , +14

Stable zirconium silicate gate dielectrics deposited directly on silicon

G. D. Wilk, Robert M. Wallace · Applied Physics Letters · 2000 · 327 citations

, , +17

Intermixing at the tantalum oxide/silicon interface in gate dielectric structures

G. B. Alers, D. J. Werder, Yves J. Chabal et al. · Applied Physics Letters · 1998 · 265 citations

, , +17