Publication | Closed Access
Thermal simulation of surface micromachined polysilicon hot plates of low power consumption
20
Citations
2
References
1999
Year
Low Power ConsumptionEngineeringMicrofabricationEnergy EfficiencyMechanical EngineeringThermal ManagementThermal SimulationThermal AnalysisPolysilicon Hot PlatesThermodynamicsThermal ModelingElectronic PackagingHeat TransferMicroelectronicsThermal EngineeringMicro-electromechanical System
| Year | Citations | |
|---|---|---|
Page 1
Page 1