The chemical vapor deposition of SiO2 from teos - Concepedia

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The chemical vapor deposition of SiO2 from teos

15

Citations

13

References

1990

Year

John E. Crowell, Laura L. Tedder, Hee-Chuen Cho, Frank M. Cascarano, M. A. Logan

Journal of Electron Spectroscopy and Related Phenomena

Chemical EngineeringEngineeringOxide ElectronicsSurface ScienceChemistrySilicon On InsulatorChemical Vapor Deposition

References

	Year	Citations

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