Concepedia

Hee-Chuen Cho

HC

4

Publications

136

Citations

4

H-Index

1990

Active since

Affiliations

University of California San Diego(Current)

Lam Research (United States)

Hee-Chuen Cho is an author at University of California San Diego specializing in chemistry, engineering, and surface science.

Top concepts

ChemistryEngineeringSurface ScienceApplied PhysicsPhotochemistrySurface ChemistryChemical EngineeringCatalysisThin FilmsMaterial Science

Publications per year

1990–1993

4

Publications

4

Model studies of dielectric thin film growth: Chemical vapor deposition of SiO2

John E. Crowell, Laura L. Tedder, Hee-Chuen Cho et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 54 citations

Engineering, Reactive Adsorption, Chemistry +19

The photo-induced reaction of digermane with the Si(100)(2 × 1):D surface

Chiharu Isobe, Hee-Chuen Cho, John E. Crowell · Surface Science · 1993 · 46 citations

Engineering, Photochemistry, D Surface +6

The photo-induced reaction of disilane with the Si(100) and Si(100)(2 × 1):D surfaces

Chiharu Isobe, Hee-Chuen Cho, John E. Crowell · Surface Science · 1993 · 21 citations

Surface Characterization, D Surfaces, Engineering +8

The chemical vapor deposition of SiO2 from teos

John E. Crowell, Laura L. Tedder, Hee-Chuen Cho et al. · Journal of Electron Spectroscopy and Related Phenomena · 1990 · 15 citations

Chemical Engineering, Engineering, Oxide Electronics +4

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