14
Publications
439
Citations
12
H-Index
1982
Active since
Affiliations
D. A. Pawlik is an author at Siemens (Germany) specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsThin FilmsSurface ScienceMaterials EngineeringHydrogenChemistryNanomaterialsPhysics
Publications per year
1982–2016
14
14
Low-pressure deposition of high-quality SiO2 films by pyrolysis of tetraethylorthosilicate
Frank Becker, D. A. Pawlik, H. Anzinger et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 103 citations
Materials Engineering, Materials Science, Low-pressure Deposition +14
Process and film characterization of low pressure tetraethylorthosilicate–borophosphosilicate glass
Frank Becker, D. A. Pawlik, H. Schäfer et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 67 citations
Materials Engineering, Materials Science, Teos–bpsg Layers +13
Rows per page
1–5 of 14